| 摘要 |
PURPOSE:To reduce the number of components by providing two opposing electromagnets and displacement sensors on two reference surfaces crossing two reference surfaces and supporting without contact a movable unit by the attracting force of the electromagnets. CONSTITUTION:Five displacement sensors 28-32 in which reference shafts 33, 34 of soft magnetic material having reference surfaces 33a, 34a, another reference shaft 35 having two reference surfaces 35a, 35b forming at the predetermined angle, and a movable unit 20 disposed in the space dsiposed between the shafts are provided and eight electromagnets 22-27 opposite to four reference surfaces are provided on the unit 20 in such a manner to be disposed to detect the motion of five directions in the space except the movable direction. Then, the unit 20 is supported and moved without contact by the attracting forces of the eight electromagnets. Accordingly, the number of elements which perform levitating function can be minimized, thereby providing a mechanism which can be stably guided. |
