| 摘要 |
PURPOSE:To improve the surface potential of an electrophotographic photosensitive material stably, by forming a blocking layer containing nitrogen in the interface between an amorphous Si(aSi) layer stabilized with hydrogen and/or fluorine and a substrate conductor or surface thereof or both. CONSTITUTION:SiH4 gas and NH3 gas mixed at a suitable ratio are introduced into a glow discharge apparatus to form an amorphous Si(aSi) layer of about 1,000Angstrom film thickness, containing nitrogen, expressed by the formula (0<x<= 0.5), and stabilized with hydrogen and/or fluorine on a substrate metal. The resultant layer acts as a blocking layer in injecting a carrier into the interface between the layer and the substrate metal. A layer of (aSi:H) or (aSi:F) to be a photoconductor is formed on the aSi layer by the same glow discharge method. A blocking layer of about 1,000Angstrom film thickness expressed by the formula is further formed finally on the resultant layer to prepare for the carrier injected from the surface. The blocking layer on either one of the interface or surface may be omitted if necessary. |
