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发明名称
DEVICE FOR CHECKING SEMICONDUCTOR DEVICES BY PHOTO RESPONSE
摘要
申请公布号
SU1027653(A1)
申请公布日期
1983.07.07
申请号
SU19823385147
申请日期
1982.02.02
申请人
SHAFER VALERIJ,SU
发明人
SHAFER VALERIJ I,SU
分类号
H01L21/66;G01R31/26;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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