摘要 |
<p>A photosensitive composition of matter suited for the production of polymer resist images which composition comprises a mixture of: (1) a photopolymerizable ethylenically unsaturated compound, (2) at least one oxime ester photopolymerization initiator, and (3) at least one sensitizer increasing the photopolymerization rate of said composition said sensitizer being defined in two general formulae said formulae including respectively a merocyanine dye, a zeromethine merocyanine dye, a carbostyril compound, an aryl-substituted 2-pyrazoline compound, an aryl-substituted oxazole compound, an aryl-substituted 1,2,4-triazole compound, an aryl-substituted 1,3,4-oxadiazole compound or an aryl-substituted-4-oxazolin-2-one compound.</p> |