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发明名称
DEVICE FOR CHECKING LARGE SCALE INTEGRATED CIRCUIT BASE
摘要
申请公布号
SU1027654(A1)
申请公布日期
1983.07.07
申请号
SU19823389108
申请日期
1982.01.22
申请人
LE I AVIATSIONNOGO PRIBOROSTROENIYA
发明人
LOPUKHIN VLADIMIR A,SU;GURYLEV ALEKSANDR S,SU;KOVESHNIKOV VAKHTANG P,SU;SHUMILIN ANATOLIJ S,SU;DIKUSHIN VALENTIN V,SU;ZYUZIN SERGEJ V,SU
分类号
H01L21/66;G01R31/26;G01R31/28;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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