| 摘要 |
PURPOSE:To prevent oxidation of metal ball by forming metal ball through the fusing of the wire tip by applying a voltage across the wire tip and electrode within an inactive ambient. CONSTITUTION:An inactive gas, for example, N2 is supplied to a gas sealed pipe 5 as shown by the arrow mark 7A and then it is outflown through an aperture 6 as indicated by the arrow mark 7B. A bonding tool 2 allowing insertion of an aluminium wire 1 is moved downward and is guided into the aperture 6. when a high voltage is applied to an electrode 8 in such a condition, discharging occurs between the electrode 8 and wire 1. Thereby, the wire tip 1 is melted and a metal ball for wire bonding is formed. |
