| 摘要 |
PURPOSE:To provide a dry type surface treating device which can treat the surfaces of materials to be treated selectively without any mask by constructing a pair of parallel flat plate type electrodes which are disposed to face each other in such a way that conductive electrode bodies are embedded in the prescribed positions of insulating substrates and providing on-off switches which can be connected to electric power sources to the respective electrode bodies. CONSTITUTION:To remove the desired parts of a Cr layer 2 by using a titled treating device, the inside of a reacting chamber 8 is maintained in a reactive gaseous atmosphere of CCl4, etc. under prescribed reactive pressure; thereafter, the on-off switches corresponding to the conductive electrode bodies corresponding to the parts to be removed are closed. For example, to remove the part A shown in the figure, the switches 22 and 25 connecting to the conductive electrode bodies 12 and 15 corresponding to the part A are closed and the switches 21, 23 and 24, 26 connecting to the other conductive electrode bodies 11, 13 and 14, 16 are held open. As a result, plasma 9 is formed between the bodies 12 and 15, and only the part A of the layer 2 is removed without forming any mask layer. |
