发明名称 |
Position detecting system |
摘要 |
A position detecting system has the following steps of: detecting picture element information (E2) corresponding to patterns on a chip (10) illuminated; calculating threshold information (E3) representing a threshold level (S1, S3) to discriminate a pad pattern (11) from the patterns on the basis of the mean (eH) of a high level portion of the picture element information (E2) and the mean (eL) of low level portion thereof; and calculating a position of the pad pattern (11) from video information (E4) discriminated with respect to the threshold level (S1, S3) by comparing a level of the threshold information (E3) with a level of video information (E4) corresponding to the picture element information (E2) used to calculate the threshold information (E3).
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申请公布号 |
US4390955(A) |
申请公布日期 |
1983.06.28 |
申请号 |
US19810269756 |
申请日期 |
1981.06.02 |
申请人 |
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA |
发明人 |
ARIMURA, YOSHIAKI |
分类号 |
H01L21/60;G01B11/00;G01B11/02;(IPC1-7):G01B11/00 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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