| 摘要 |
PURPOSE:To obtain the sample moving device for an electron beam patterning device having no hindrance in vacuumization and maintenance of vacuum state of a connection cable. CONSTITUTION:In the diagram, 1 is a vacuum container 2, is a sample moving stand, which is in movable the X and Y direction and installed in the vacuum container 1, 3 is an airtight terminal to be electrically connected to the electric detecting part (not illustrated) of the sample moving stand 2, 4 is a connection cable which is electrically connecting the airtight terminal 3 and the electric control section (not illustrated) provided outsides the vacuum container 1, and 6 is a cylindrical body, consisting of an elastic member, having flexibility (bendable and elastic) and vacuum state maintaining property, wherein a connection cable is inserted. The outer circumference of one end part of the cylindrical body 6 is airtightly fixed to the airtight terminal 3 using an O-ring 7, and the outer circumference of the other end part is airtightly fixed to the vacuum container 1 in a through hole 8 on the vacuum container 1 using an O-ring 2. In other words, the connection cable 4 is vacuum-isolated from the inner part of the vacuum container 1 by the cylindrical body 6. |
