| 摘要 |
The polygonal shaped source members are preferably hexagonal. Each polygonal region has a relatively deep central portion(122, 123) and an outer shallow shelf portion(124, 125). The shelf portion generally underlies an annular source region(126, 127). The deep central portion underlies an aluminum conductive electrode(150) and is sufficiently deep that it will not be fully penetrated by aluminum spiking.
|
