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发明名称
VERFAHREN ZUR HERSTELLUNG VON DUENNFILM-TRANSISTOREN
摘要
申请公布号
DE3245313(A1)
申请公布日期
1983.06.23
申请号
DE19823245313
申请日期
1982.12.08
申请人
SHARP K.K.;JAPAN ELECTRONIC INDUSTRY DEVELOPMENT ASSOCIATION
发明人
KATO,HIROAKI;KISHI,KOHHEI;TAKAFUJI,YUTAKA
分类号
H01L29/78;H01L21/28;H01L21/316;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):H01L29/78;H01L21/31
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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