摘要 |
<p>PURPOSE:To obtain a humidity-sensitive element having excellent humidity- sensing characteristics, by using at least one kind of conductor powder or semiconductor powder, solid electrolyte powder, and organic high molecules cross- linked by a zirconium compound, as constituents of a humidity-sensitive film. CONSTITUTION:The semiconductor powder of MnO2 of 4.7g and the solid electrolyte powder of H3O<+>-betaAl2O3 of 3.8g are added to acid anhydride type epoxy resin of 0.7g, an alcohol solution of zirconium oxychloride is added thereto and mixed, ethyl alcohol is further added thereto, and thereby paste having an appropriate viscosity is prepared. The paste thus prepared is applied on an alumina substrate 1 whereon opposite electrodes 2 and 3 of gold are formed, and baked, whereby a humidity-sensitive film 4 is formed. The solid electrolyte powder is formed at least one kind of a proton conductor and an alkaline ion conductor, while a zirconium compound is formed of at least one kind of zirconium oxychloride, zirconium acetate, and the denatured hydrates of these salts.</p> |