| 摘要 |
PURPOSE:To make the measured value more accurate by a method wherein a specified size of resist pattern is provided on a specified position adjoining a resist pattern for measurement. CONSTITUTION:The resist patterns L5 with line width exceeding two times of resistless pattern S4 for measurement are provided on both sides of the resistless pattern S4 for measurement while on both sides of resist pattern L4 for measurement, the resist patterns L5 with line width exceeding at least two times of said pattern L4 holding said resistless pattern S4 with line width similar to that of the pattern for measurement are provided outside said pattern L4. Through these procedures, the values more approximating to the line width inside circuit pattern may be measured making them more accurate. |
