| 摘要 |
PURPOSE:To reduce the required number of samples and the required time in an evaluation test with a forcible acceleration of the water infiltration process in the corrosion of an Al wiring and the like due to water infiltration by repeating a sharp temperature control and pressure control with temperature control and pressure control devices modified added to a pressure cooker test apparatus. CONSTITUTION:Water and a semiconductor device are placed in a pressure cooker (d) provided with a temperature control (a), a pressure control (b) and a timer (c) and sealed and heated with a heater (e). As the temperature reaches 125 deg.C as specified by the temperature control (a), air containing steam is discharged out of the cooker with the pressure control (b) to control the pressure inside the pressure cooker (d) to the steam pressure. Up to this process, the timer (c) is operated for 20hr. Thereafter, the temperature is lowered to 50 deg.C with the temperature control (a) and under such a condition, the timer (c) is put into operation for 8hr. Then, the temperature is raised to 125 deg.C with the temperature control (a) again and under such a condition, the timer (c) is put into operation for 20hr. After the timer (c) stops, the heater (e) is turned off. |
