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发明名称	AUTOMATIC PROBE HEAD
摘要
申请公布号	JPS5892968(A)	申请公布日期	1983.06.02
申请号	JP19810190739	申请日期	1981.11.30
申请人	HITACHI SEISAKUSHO KK	发明人	KAWAGUCHI IKUO
分类号	G01R31/28;H01L21/66	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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