PLASMA TREATMENT APPARATUS,申请号GB19830011350-传众专利搜索

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发明名称	PLASMA TREATMENT APPARATUS
摘要
申请公布号	GB8311350(D0)	申请公布日期	1983.06.02
申请号	GB19830011350	申请日期	1983.04.26
申请人	DOBSON, C D	发明人
分类号	H01J37/32;(IPC1-7):H01L21/302	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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