| 摘要 |
PURPOSE:To prevent the generation of dust and to permit to lengthen the effective length of a heating furnace as long as possible by a method wherein the stroke of loading mechanism is shortened to its possible minimum. CONSTITUTION:In the drawing, the numeral 11 is a vertical heating furnace, 12 is a core tube and a two-stage loading mechanism consisting of a combination of the first loading mechanism 13, and the second loading mechanism 14 is positioned at the lower part of the heating furnace 11. Firstly, after mounting a basket 18 housing a basket stage 19 and a wafer on the upper face of a cap 15, the first motor 20 is firstly driven to operate the first loading mechaism 13, and the cap 15 is loaded at the lower end of the core tube 12. Secondly, when the second motor 21 driven to operate the second loading mechanism 14, a pillar 16 rotates to engage a claw section 17 with the basket 18 and then, the pillar 16 moves upwards, and the basket 18 is loaded in the center of the furnace. After completing a predetermined heat treatment or the like, an operation which is quite opposite to said loading operation is executed. |
