| 摘要 |
Two diaphragm layers (18a, 18b) which are individually fluid-tight are firmly clamped in their edge area. In the clamping area, two thin rings (25, 25') are located between the diaphragm layers (18a, 18b). The surfaces (25a, 25'a), of the rings, adjacent to one another are roughened, for example by sand-blasting. Due to the roughening a radial flow connection is created between the inner edges (30) of the rings and their outer circumference, through which connection, in the event of damage to the diaphragm, fluid penetrating between the diaphragm layers (18a, 18b) can pass to a sensor. The device is simple and inexpensive to manufacture compared to pumps in which the connection of the chamber between the membrane layers is created by shims with bored ducts. <IMAGE>
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