| 摘要 |
PURPOSE:To eliminate variation of detector resistance, by forming a permalloy pattern, and an electric conductor pattern consisting of Al, by an ion etching method and a reactive sputter-etching method, respectively, through a spacer on a magnetic body layer on a non-magnetic material substrate. CONSTITUTION:On a magnetic material layer 12 on a non-magnetic material substrate 11, the first spacer layer 13 and a permalloy layer 14 are stuck, and a permalloy pattern 15 is formed by ion etching by using a resist pattern as a mask. On said pattern, an electric conductor layer 16 consisting of Al or an Al or an Al-copper alloy is stuck, and an electric conductor pattern 17 is formed by a reactive sputter-etching method by using a resist as a mask. On the surface, a protective layer 18 is stuck, its heat treatment is executed at 400-550 deg.C, and a magnetic bubble detector is manufactured. In this way, variations of detector resistance, disconnection, etc. are eliminated. |
