| 摘要 |
PURPOSE:To align the passage of particles with a laser beam by radiating the laser beam along the passage of particles radiated on a sample and by observing the laser beam scattered by the particles. CONSTITUTION:Ions from an argon ion source 1 are injected into an impact chamber 3 filled with argon gas, and argon neutral particles passed through are radiated to a reflecting mirror 5. On the other hand, a laser beam from a laser oscillator 6 is radiated to the reflecting mirror 5 through a lens system 7 so as to be reflected and to proceed along the passage of neutral particles. The flow of neutral particles is observed with a scattered laser beam through a peephole 11 to check whether the laser beam coincides with the passage of the neutral particle beam, and after alignment a target 10 holding an ionized material is inserted. Accordingly, by utilizing the scattered laser beam, the correct alignment and precise mass spectrometry can be available. |
