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发明名称
METHOD OF PRODUCING MOS ELEMENT
摘要
申请公布号
JPS5887855(A)
申请公布日期
1983.05.25
申请号
JP19810179877
申请日期
1981.11.11
申请人
TEKTRONIX INC
发明人
TADANORI YAMAGUCHI
分类号
H01L27/088;H01L21/8234;H01L27/06;H01L27/08;H01L29/78
主分类号
H01L27/088
代理机构
代理人
主权项
地址
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