| 摘要 |
PURPOSE:To render temperature distribution uniform in a furnace, especially, near a conveyor belt, and to enlarge a uniform temp. zone, by installing a heat source and a reflective plate right below the belt in addition to a main heat source to control temp. CONSTITUTION:Infared lamps are used for a main heat source 1 of a baking furnace for hardening a photoresist, the main body is made of a stainless steel plate 2, in its inside a belt conveyor 3 for conveying the photoresist to be hardened and a belt driver 4 are fixed, a metallic plate, e.g., a stainless steal plate 5 is arranged just below the belt 3 along it, a ribbon heater 6 is installed under the lower side of the plate 5. This heater 6 is connected with a power supply other than that of the heater 1 to correct the parts not uniform in temp. due to the structure of the furnace by controlling voltage of the power supply and an amt. of heat emitted, thus permitting stability of hardened state to be raised by increase of uniformity of temp. near the photoresist to be hardened, and increase of a temp. uniform zone. |
