| 摘要 |
PURPOSE:To obtain a recording medium which provides high-density recording while improving vertical orientaion by forming a metalic layer of hexagonal closed-packed lattice structure of Ti, etc., while an insulating substrate is preheated, and then forming a vertically magnetized film on it. CONSTITUTION:An insulating substrate whose Al surface is converted to Alumite by oxidation is arranged for a vacuum-depositon container. This substrate is heated up to 200 deg.C, gaseous Ar is introduced, and a Ti target is heated by irradiation to form a Ti metallic film on the substrate. While CoCr alloy (20 atom % Co) is regarded as a target, a vertically magnetized film having magnetic anisotropy perpendicular to the substrate surface is formed on the Ti metallic film. Thus, the substrate is preheated and CoCr is vacuum-diposited after the orientation in the C-axis direction of the closest-packed lattice structure of the crystal structure of Ti is increased to increase the vertical magnetism anisotropy, improving the reliability of recording. |
