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发明名称
SCANNING ELECTRON MICROSCOPE STAGE
摘要
申请公布号
SU1018175(A1)
申请公布日期
1983.05.15
申请号
SU19813325209
申请日期
1981.08.11
申请人
LEMELEKHES SEMEN L,SU;MALEV YAKOV SH,SU;NOVIKOV IGOR,SU
发明人
LEMELEKHES SEMEN L,SU;MALEV YAKOV SH,SU;NOVIKOV IGOR I,SU
分类号
H01J37/20;(IPC1-7):H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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