| 摘要 |
PURPOSE:To perform highly accurate measurement without contact, by irradiating a light beam from a light beam projector, receiving the light diffused by craters in the machined surface, and measuring the degree of craters based on the amount of the received light. CONSTITUTION:In the measurement of the craters 10, the light beam projector 12 and a diffused light receiver 13 are arranged in a plane perpendicular to a rotary shaft 11 of a material to be machined 1. The light is projected and received in the direction of the width with respect to each crater 10, which is directed in the longitudinal direction perpendicular to a roll groove 8, and the amount of the diffused light at the machined surface 1a of the material to be machined 1 is measured. Meanwhile, the measurement of the roll grooves 8 and streaks 9 are performed as follows. A light beam projector 12' and a light reflecting position sensor 14 are arranged in the plane including the rotary shaft 11 over the machined surface 1a of the material to be machined 1. The light is irradiated from the light projector 12' from the slant upper position to the machined surface 12' and the degree of the roll groove 8 is measured by the light reflecting position sensor 14. The degree of the streak 9 is measured by the diffused light reciver 13'. |
