Vibrating beam rotation sensor

摘要

A rotation sensor having a vibrating cantilever beam is disclosed herein. The sensor comprises an integral single crystal silicon cantilever beam and support structure, an oscillator circuit for generating an electrical signal vibrating the cantilever beam at or near its natural resonant frequency and a piezoresistive element formed at the base of the base of the vibrating beam. The piezoresistive element is only sensitive to the stresses induced in the beam due to the rotation of the beam about an axis parallel to its length.