发明名称 X-Ray detector of semiconductor type
摘要 An X-ray detector of semiconductor type in which reflected electrons emitted from a sample are diverted to another direction by the action of a magnetic field provided across a passage for X-rays from a sample to an X-ray detecting element of semiconductor type, and an absorbent for absorbing reflected electrons is arranged ahead of the magnetic field in the path of the diverted reflected electrons, so as to prevent the reflected electrons from being incident on the X-ray detecting element, thereby improving the S/N ratio of the detecting element.
申请公布号 US4382183(A) 申请公布日期 1983.05.03
申请号 US19810223291 申请日期 1981.01.08
申请人 HORIBA LTD. 发明人 KIMURA, OSAMU
分类号 G01N23/22;G01T1/24;H01L31/09;H01L31/115;(IPC1-7):G01N23/00;G01T1/22 主分类号 G01N23/22
代理机构 代理人
主权项
地址