摘要 |
PURPOSE:To realize measurement and control with high accuracy over a wide range from a minor flow rate region to a major flow rate region, by providing a major flow path and a minor flow path and then having the switching control between the major and minor operation terminals. CONSTITUTION:When a level of an upper limit detector 61 exceeds its upper limit value in a minor flow rate region, a signal is held and a switching signal 8 is turned on. Then a minor operation terminal is switched to a major operation terminal by an output switch 68. Then an operating degree is delivered in accordance with a transient state signal 9 which is set simultaneously with the signal 8 in order to secure a certain opening of the operation terminal of an output converter 67 as well as the holding of the set value of a holder 65. Thus a minor flow rate region is shifted to a major flow rate region. The transient state of switching is prescribed by a timer 63, and the operating degree toward the closing direction is delivered to the minor operation terminal. Furthermore, the switching of a measured value input detecting terminal is carried out along with the switching by a range switch 66 of the set value in accordance with a shift to the major flow rate region. |