| 摘要 |
PURPOSE:To prevent a short circuit at the open detection part of an electrode for resistance detection during polishing, by making the width of the open detection part much less than that of a short-circuit detection part. CONSTITUTION:An electrode 41 for resistance detection is formed of, for example, Al and has a short-circuit detection part 42 and an open detection part 43. The line width (f) of the open detection part 43 is much less than the line width (a) of the short-circuit detection part 42. Namemly, (f) is 1mum and (a) is 100mum. Thus, the electrode 41 for resistance detection is formed and used as a substitute for a conventional electrode 23. Consequently, a short-circuit due to a burr and a shear drop during polishing is formed between neither points B and C nor points D and X between the electrode 41 and a conductor 25 (lower magnetic layer) by setting the line width (f) to 1mum, and a short circuit is formed again at a polishing stop position, so that a detecting signal is detected by resistance detectors 27 and 27'. |
