发明名称 COATING SOLVENT FOR JUNCTION FORMING
摘要 PURPOSE:To enable to form a highly efficient solar cell with high sensitivity to the light at the short wave side by a method wherein the coating solvent, a solvent containing the solute mainly composed of tantalum alkoxyde containing p-n junction forming dopant. CONSTITUTION:The solvent is composed of ethanol and enthyl acetate with mixed ratio of 1:1. Tantalum chelate[Ta(OH2)(OCHRCOOH)3]and tantalum acylate[Ta(OR)3(OCOR)2]are added to the solute mainly composed of tantalum alkoxide[Ta(OR)6]. Next 50 wt% phosphorus pentaoxide (P2O6) is added thereto and the solvent is agitated to mix, producing the junction forming coating solvent. The anti-reflection film 2 comprising tantalum pentaoxide containing phosphorus as an impurity may be formed on the silicon substrate 1 by means of turning a spinner to coat the substrate 1 with said coating solvent and performing heat-treatment. Then p-n junction 3 is formed by means of sintering process.
申请公布号 JPS5860580(A) 申请公布日期 1983.04.11
申请号 JP19810158220 申请日期 1981.10.06
申请人 TOKYO SHIBAURA DENKI KK 发明人 NAKANO HIROTAKA;KATOU TAKETOSHI
分类号 H01L21/225;H01L31/0216;H01L31/04 主分类号 H01L21/225
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