摘要 |
PURPOSE:To enable to form a highly efficient solar cell with high sensitivity to the light at the short wave side by a method wherein the coating solvent, a solvent containing the solute mainly composed of tantalum alkoxyde containing p-n junction forming dopant. CONSTITUTION:The solvent is composed of ethanol and enthyl acetate with mixed ratio of 1:1. Tantalum chelate[Ta(OH2)(OCHRCOOH)3]and tantalum acylate[Ta(OR)3(OCOR)2]are added to the solute mainly composed of tantalum alkoxide[Ta(OR)6]. Next 50 wt% phosphorus pentaoxide (P2O6) is added thereto and the solvent is agitated to mix, producing the junction forming coating solvent. The anti-reflection film 2 comprising tantalum pentaoxide containing phosphorus as an impurity may be formed on the silicon substrate 1 by means of turning a spinner to coat the substrate 1 with said coating solvent and performing heat-treatment. Then p-n junction 3 is formed by means of sintering process. |