| 摘要 |
<p>PURPOSE:To increase the exhaust speed and the compression ratio of a molecular turbo-pump, by disposing turbine wheels of an outer rotor between adjacent turbine wheels of an inner rotor shaft in the manner that they are located alternately with each other, and turning them in opposite directions to each other. CONSTITUTION:A turning shaft 1 having rotor blades 3 arranged in proper stages is turned by a motor connected to a fixed shaft 2. Reversely turned blades 6 having the same shape as the rotor blades 3 and fixed to an outer turning shaft 8 are disposed between the rotor blades 3 in the manner that they are located alternately with each other, and the outer turning shaft 8 is turned by a motor 11 in the opposite direction to the turning shaft 1. With such an arrangement, it is enabled to increase the probability in transporting molecules of a gas and to thereby increase the exhaust speed and the compression ratio of a molecular turbo-pump.</p> |
