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发明名称
ETCHING COMPOSITION
摘要
申请公布号
JPS5853980(A)
申请公布日期
1983.03.30
申请号
JP19810152413
申请日期
1981.09.25
申请人
DAIKIN KOGYO KK
发明人
HISAMOTO IWAO;MAEDA TOMOAKI;MATSUDA SATORU
分类号
C09K13/08;C23F1/24;H01L21/306;H01L21/308
主分类号
C09K13/08
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代理人
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