| 摘要 |
PURPOSE:To process a lot of head chips at the same time without exfoliation of a soft magnetic film and with good yield, by performing grooving from the back side of a nonmagnetic substrate attached and processed with the soft magnetic substance film. CONSTITUTION:The 1st soft magnetic substance film 16 having a film thickness equal to the track width is adhered on a nonmagnetic substrate 15 vacuum deposition to form grooves taking a lot of gap surfaces 17 as a side surface. After sticking a gap spacer film 18, the 2nd soft magnetic substance film 19 is stuck, unnecessary part of the film 19 is eliminated with grinding to form an operating gap 20 and a head magnetic path. A nonmagnetic thick film 21 is stuck on the films 16 and 19 with vapor deposition and a winding window hole 22 is formed at a specified location. Next, with the back side of the substrates 15 faced upward after forming grooves 24 from a tape sliding part to the hole 22 by using a slicing blade 23, the substrate 15 is cut in parallel with the grooves 24 and along an orthogonal cut part 25 to cut out a lot of head chips 26. |
