| 摘要 |
PURPOSE:To enhance image quality, by using a laminate structure of a layer of an amorphous selenium or made of an alloy consisting mainly of it, and a layer contg. amorphous silicon, or further silicon formed on this layer incorporated with carbon, and forming a smooth surface layer of amorphous silicon. CONSTITUTION:A substrate 1 is of a conductive aluminum or stainless steel plate used for a conventional electrophotographic receptor, or an electrically insulating resin or glass substrate having a conductive layer on its surface. A first vapor deposited layer 2 of a-Se or consisting mainly of a-Se, e.g., a-Se/Te is formed by the usual vapor deposition method on this substrate 1. On this layer 2, a second a-Se layer 3 is formed usually by the SiH4 or the like glow discharge decomposition, sputtering, or the like method. To control dark resistance and light response speed, usually 1-40mol% H is added, and to enlarge an energy gap of a-Se, carbon is added so as to control x to 0.1-0.8 in Si1-xCx. |
