| 摘要 |
PURPOSE:To obtain magnetic recording media of vapor deposited magnetic thin film type inexpensively in large quantities by forming magnetic layers and non- magnetic layers with the same width of gaseous atmospheres. CONSTITUTION:A long sized substrate 4 is run from an unrolling shaft 5 to a take-up shaft 9 along the vapor depositing cylinder 8 in a vacuum vessel 1 of <=10<-3> Torr and a magnetic material such as Co is vapor deposited through a mask 12 from an evaporating system consisting of a heat source 9 for evaporation, a crucible 10, and an evaporating source 11 of the magnetic material in the crucible. Here, a gas such as oxygen or ozone is blown out from a nozzle 14 for supplying of gas in the direction of an arrow A so as to assume the state of diffusing in evaporating atoms 13, whereby a magnetic layer 17 having desired magnetic characteristics is formed. Further in the same stage, a gas such as oxygen, ozone or the like is blown out in a local direction (arrow B) in the part where the incident angle is low, from a nozzle 15 for supplying of gas, whereby a non-magnetic layer 18 which is the oxide of the magnetic material is provided successively. |
