| 摘要 |
<p>PURPOSE:To apply uniformly a low-viscosity solution onto the surface of an electronic device substrate under the control of a computer, by arranging a piezoeletric element on one glass plate of two glass plates so that the coating liquid sucked into a coating liquid sink provided on the other glass plate is jetted from a nozzle. CONSTITUTION:A glass plate 2 is provided with a recess part 4 as a coating liquid sink and a groove 3 as a coating liquid flow path, and a glass plate 1 is provided with a piezoelectric element 5 in the position corresponding to the recess part 4, and glass plates 1 and 2 are joined to each other while interposing a suction tube for a coating liquid 7 from a coating liquid tank 11 to make a nozzle 6 having an injection hole 10. The nozzle 6 is fixed to a driving body 14 which can be moved in X-axis and Y-axis direction by members 12 and 13, and a substrate 16 is attracted to a mounting base 16 by vacuum and is held, and the solution of a low viscosity of 0.5-1,000cps is jetted synchronously with the nozzle position to apply the solution uniformly and thin in accordance with a pattern. Thus, an orientation film and a transparent electrode are produced easily with a high dimension precision.</p> |
