发明名称 MICROSCOPE FOR INSPECTION OF PATTERN
摘要 PURPOSE:To permit quick observation by omission of calculations by providing scales and marks indicating the scales between a placing part and a moving part and between the moving part and a stationary part, and making the scales and/ or marks movable on the surfaces of the parts to which these are mounted. CONSTITUTION:This invention relates to a microscope which inspects a specimen by a frame 3 which is a placing part for the specimen, a stage 2 which is a moving part for supporting the frame, and a microscope body 1 which is a stationary part for supporting the stage 2, wherein iron scales 6, 7 are provided between the frame 3 and the stage 2 and between the stage 2 and the body 1, and a fixed mark is used for the mark for indicating the scales; for example, the end part 10 of the upper stage 2 is used for the mark for the scale on the lower side and the scales and/marks are made movable on the surfaces of the parts to which these are mounted.
申请公布号 JPS5837615(A) 申请公布日期 1983.03.04
申请号 JP19810135182 申请日期 1981.08.28
申请人 FUJITSU KK 发明人 MATSUI SHIYOUGO
分类号 G01B9/02;G01B11/24;G02B21/26;H01L21/027;H01L21/66 主分类号 G01B9/02
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