| 摘要 |
PURPOSE:To measure optical distances and surface shapes inexpensively with high accuracy in a large measuring range in a measuring device for optical distances and surface shapes by polarizing pulse light periodically and operating the optical distances or surface shapes from the detection positions and deflection angles of the reflected light from an object. CONSTITUTION:The pulse light of a constant period from a laser source 2 is deflected periodically with an optical deflector 3. A photodetector 4 is placed in the position of a known angle thetao, and an object 1 is placed in the direction of an unknown angle thetai. A photodetector group 5 is placed on the same plane as the front surface of the deflector. If the respective unit elements 51-5n detect only the vertical incident light, the scattered and reflected light at the point P on an object is detected by, for example, the element 5i. If the distance between the element 5i and the deflector is defined as D, the distance L between the point P and the element 5i is determined by L=D/tanthetai. Since thetai-thetao is determined from the difference Ti in the output pulse time of the photodetector 4 and the element 5i and the period of the deflector, the thetai is beforehand determined from the same. |
