发明名称 |
ODLING AV MONOKRISTALLINT SKIKT |
摘要 |
An apertured mask layer is disposed on a substrate having a monocrystalline portion at a surface thereof. Essentially all edges of the mask apertures are parallel to a predetermined crystallographic direction. A monocrystalline layer is then deposited such that it grows within the mask apertures and over the mask in a direction perpendicular to the aperture edges. |
申请公布号 |
SE8301028(D0) |
申请公布日期 |
1983.02.24 |
申请号 |
SE19830001028 |
申请日期 |
1983.02.24 |
申请人 |
RCA CORPORATION |
发明人 |
J T * MCGINN;L L * JASTRZEBSKI;J F * CORBOY JR |
分类号 |
H01L27/12;C30B25/18;H01L21/02;H01L21/20;H01L21/263;H01L21/86 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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