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经营范围
发明名称
FILM DEPOSITING APPARATUS
摘要
申请公布号
GB8300948(D0)
申请公布日期
1983.02.16
申请号
GB19830000948
申请日期
1983.01.14
申请人
TOKYO SHIBAURA DENKI KK
发明人
分类号
C23C16/505;C23C16/509;C23C16/54;H01J37/18;H01J37/32;H01L21/00;(IPC1-7):G03G5/08
主分类号
C23C16/505
代理机构
代理人
主权项
地址
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