发明名称 POSITIONING DEVICE FOR ROUND-SHAPED SUBSTANCE
摘要 PURPOSE:To eliminate the eccentricity of a stand and a disk and to position the disk by a method wherein the disk floated on the stand is held from the circumference by a reciprocating movable member and a notch is detected by rotating the stand and the stand is stopped when the notch arrives at the predetermined position adsorb the disk. CONSTITUTION:A disk 1 is carried 30 to optically detect 32 and the center is stopped on a stand 2 and the disk 1 is moved to the stand 2 by descending a pulley 31. The disk 1 is floated by exhausting air from the groove 2c of the stand. A motor 14 starts to rotated a cam 9 by a spring 11 and each tip of five arms 6 concentrically arranged on the stand 2 proceeds to center 01 by recessed sections 9a and a bearing 7 to hold the edge of the disk and the cam plate 9 stops by eliminating the eccentricity of the disk. The motor 14 rotates again and each arm opens to the outside before a bearing 12 idles in the notch 9b and again abuts the end surface 9c. Then, the disk is adsorbed to the stand by changing to inspiration. A notch F is judged and detected 33 by rotating 5 the stand and the stand 2 is suddenly stopped when the notch is correctly positioned on a sensor 33. With these operation executed by electrical control, the disk with notches can always be set in the determined direction.
申请公布号 JPS5818937(A) 申请公布日期 1983.02.03
申请号 JP19820050921 申请日期 1982.03.31
申请人 NIHON KOUGAKU KOGYO KK 发明人 KOBAYASHI JIROU;KOBAYASHI KAZUHIKO
分类号 H01L21/30;G05D3/00;H01L21/027;H01L21/68 主分类号 H01L21/30
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