| 摘要 |
PURPOSE:To improve the manufacturing yield and durability of a film structure type oxygen sensor, by preventing line disconnection by providing an electrode reinforcing part at a contact border part between a reference electrode and a solid electrolyte. CONSTITUTION:A conductive material paste such as Pt paste is printed on a base material 11 of a ceramic green sheet to form a heater 12, and then lead wires 18a, 18b, 18c such as Pt are placed on. A member having two through-holes 19b, 19c is press-fixed to the same material as the above-mentioned base material 11. A solid elecrolyte paste 13 such as Y2O3-ZrO2 is screen-printed on the laminated base material 11 mentioned above and a paste such as Pt is printed on the electrolyte paste 13 to form a reference electrode 14. Further, a solid electrolyte layer 15 larger than the electrode 14 is printed with the same paste as the paste 13 and then the same paste as the electrode 14 is printed in the same thickness as that of the electrode 14 at a contact border part between the electrode 14 and the electrolyte layer 15 to form an electrode reinforcing part 21. A measuring electrode 16 is formed on the electrolyte layer 15 with a conductive paste and at the same time the conductive paste is filled into holes 19b, 19c and afterwards this is calcined and sintered. After calcining, a protecting layer is stuck by melt-spraying CaO-ZrO2, etc. to complete a sensor. |
