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发明名称
ANORDNUNG ZUR AUTOMATISCHEN JUSTIERUNG MINDESTENS EINES GEGENSTANDES
摘要
申请公布号
DD158824(A1)
申请公布日期
1983.02.02
申请号
DD19800224904
申请日期
1980.11.03
申请人
SCHORCHT,ADELBRECHT,DD;KLINGENFELD,DIETMAR,DD;HESSE,REINER,DD;DASTIS,RAINER,DD;LINZ,VOLKER,DD
发明人
SCHORCHT,ADELBRECHT,DD;KLINGENFELD,DIETMAR,DD;HESSE,REINER,DD;DASTIS,RAINER,DD;LINZ,VOLKER,DD
分类号
H01L21/30;G03F9/00;G05D3/12;H01L21/027;(IPC1-7):G02B21/18
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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