| 摘要 |
PURPOSE:To obtain an optical information recording medium with high sensitivity and long life by forming a recording film which contains low melting point metals, and C, P, and H on a substrate. CONSTITUTION:On a glass or synthetic resin substrate 1, a recording film 2 which contains 5-40 atom % C and 1-50 atom % P when the composition is represented by the formula, where H is determined by the formation of the recording film 2 and M is a metal such as Bi (fusion point; 217 deg.C), Cd, and In having a 25-600 deg.C fusion point or alloy such as InSb (535 deg.C). For the formation, said metal is used as a target, and reactive sputtering is carried out in mixed gas of CH4 and PH3. Consequently, the recording film becomes hard to deteriorate owing to O2 in the air and humidity, etc., thereby obtaining a recording medium which has long life and high sensitivity. |
