| 摘要 |
PURPOSE:To obtain an optical information recording medium with high sensitivity and long life by forming a recording film which contains Te, C, B, and H on a substrate. CONSTITUTION:On a glass or synthetic resin substrate 1, a 200Angstrom thickness recording film is formed which contains 5-40 atom% C and 1-50 atom% B with composition represented by the formula while H is determined during the formation of the recording film 2. For example, Te is used as a target and sputtering is performed in mixed gas of CH4 and B2H6 to form the film 2. Consequently, the recording film is prevented from deteriorating in sensitivity owing to the formation of a transparent area due to oxidation due to environmental O2 and humidity. Thus, the durability and sensitivity are improved. |
