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发明名称
HALBLEITERANORDNUNG
摘要
申请公布号
DE3223842(A1)
申请公布日期
1983.01.13
申请号
DE19823223842
申请日期
1982.06.25
申请人
KABUSHIKI KAISHA SUWA SEIKOSHA
发明人
KATO,JURI
分类号
H01L21/76;H01L21/763;(IPC1-7):H01L27/08;H01L29/78
主分类号
H01L21/76
代理机构
代理人
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