| 摘要 |
PURPOSE:To conduct the normalization of an energy analysis curve by material shape effect at high speed, by providing a secondary electron leading electrode with a secondary electron-light transducer, receiving a light therefrom, and performing thereby a feedback control of a secondary electron detection output. CONSTITUTION:A DC voltage for leading is impressed from a positive DC high- voltage power supply 5 on secondary electrons emitted from a sample 2, and these electrons are transduced into lights having a luminous energy proportional to the secondary electrons by a scintillator constituting a secondary electron- light transducer of a grid 14 of a leading electrode which is formed of a metal mesh member and a glass semispherical member. These lights are received by a photoelectric transducer 11 of a grid 15 which forms an analyzing electrode and is similar to the grid 14, and thereby a secondary electron detection value obtained via a secondary electron detector 8 is subjected to a feedback control. By this rapid feedback control made not by a secondary electron current flowing through the grid 14 but by a light corresponding to a secondary electron, the normalization of an energy analysis curve by the material shape effect is made at high speed, and thereby a voltage of the secondary electron can be measured. |
