| 摘要 |
PURPOSE:To remove a deposited product without scratching the surface of glass mask by holding the surface of the mask with two flat sponge rotary plates and rotating the plates in the same direction at the same rotating speed. CONSTITUTION:Circular flat sponge plates 1, 2 are secured to rotary plates 3, 4 oppositely, rotational shafts 7, 8 are rotated in the same direction at the same speed, a glass mask 10 is secured with a clamp 9, is inserted between the plates 1 and 2, and the surface of the mask 10 is cleaned with the sponges. |
