| 摘要 |
PURPOSE:To perform alignment in large magnifacation and high accuracy, by a method wherein alignment mark is spaced from junction position of an inner lead and a fixed ITV detects the deviation of position and corrects it. CONSTITUTION:An alignment mark 13a of an inner lead 13 is made a reference reticle 7a and stored in a processor 8, and distance X1, Y1 from a contact center 14 to the mark 13a is stored in a bonder. When the inner lead 13 comes to the junction positition, XY base 10 is driven and frame 11 is moved. Therefore a supported carrier tape 1 is moved by X1, Y1 and the mark 13a comes to a position (junction position 14) just below a fixed TV camera 6. The reference reticle 7a and the mark 13a in this state are displayed on a monitor 7, and the deviation x, y is detected. The frame 11 is moved by command from the processor 8 and the carrier tape is reversed by X1- x, Y1- y and the deviation is corrected and the junction position of the lead 13 and a die 5 is registered and the junction is effected. In this constitution, magnification of the camera is fully raised and the deviation of position is corrected accurately. |
