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发明名称
METHOD OF MONITORING THE THICKNESS OF THIN DIELECTRIC FILMS AND PERFORMANCE OF THE METHOD
摘要
申请公布号
EP0019724(B1)
申请公布日期
1982.12.29
申请号
EP19800102243
申请日期
1980.04.25
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GORDON II, JOSEPH GROVER;PHILPOTT, MICHAEL RONALD;SWALEN, JEROME DOUGLAS
分类号
G01B11/06;G01N21/55;(IPC1-7):01B11/06;01N21/86;11B5/84
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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